Documentation of RSD2013v3

(version date 2018/11/29)

Content

Installation
- Files and directories
Overview
Quick start
Graphical User Interface (GUI)
- Concept
- Menu
- Tabs
- - Method
- - Target
- - Substrate
- - Output
- Simulation list
Command line
Input files
Output files

Legend

[RSD only] indicates that these parameters/options only apply for the RSD2013 model
sample text this text formatting refers that it can be found back on the graphical user interface (GUI) or on your computer
sample text this text formatting refers that it is a link to another section or external source

indicate possible watch-outs or warnings
indicate useful hints to setup a simulation
option is not (yet) available
www link to an external (web)source

Installation

Installation of the RSD2013 software is simple. Unpack the compressed zip file to a location of your choice. You can easily start off using the software by running the RSD2013_GUI.exe which opens the graphical user interface (GUI). The RSD2013 software only runs on a Windows platform.

Files and directories

RSD2013_GUI.exe

This executable starts the graphical user interface (GUI) of the RSD2013 software. The GUI allows to create the necessary input files and to start up one or more RSD simulations.

RSD2013.exe

This executable can only be started from the command line supplied with the main input file. It starts an individual RSD simulation specified by this main input file which may be generated with the GUI or manually. Renaming RSD2013.exe will make running simulations through the GUI impossible.

Changelog.txt

This document summarizes the new features and bug fixes in each release of RSD2013.

README.txt

Short documentation to quick start the use of RSD2013 and the used formatting conventions of the simulation output.

Disclaimer.txt

This document contains the DISCLAIMER OF WARRANTIES AND LIMITATION OF LIABILITY.

icons

This directory contains the icons and figures used in the GUI. This directory should be left intact.

templates

This directory contains headings which are attached to the generated input files. This directory should be left intact.

simtra_v2.2 (optional)

This directory contains the Monte Carlo simulation program SiMTra which may be used to produce (re)deposition profile files of the sputtered material on the substrate (and target) surfaces.

INPUT (optional)

This directory contains example (main) input files for RSD simulations. It can optionally been used to store your own input files.

OUTPUT (optional)

In this directory, the output files from the example RSD simulations be saved. It can optionally been used to save your own simulation output.

Overview

The RSD2013 software is developed to simulate the reactive sputter process of a constant or pulsed DC magnetron. Process operation curves as function of a single Varied operation parameter are reproduced where the focus is on a possible hysteresis in the observables as function of this Varied operation parameter. Two models are provided: the “original” Berg model or the RSD2013 model. The mathematical formulation of both models can be found in the thesis “Modeling the reactive magnetron sputtering process”www and in the article “ A time-dependent model for reactive sputter deposition”www.


Their can be some confusion in terminology but context should make things clear:
- RSD simulation = simulation with the Berg model or the RSD2013 model
- RSD2013 = either the simulation software as a whole or the specific RSD2013 model
- RSD input files = input files for a RSD simulation

The following variables are resolved, depending on the used model and the chosen options:

Variable Units Description
pr Pa pressure reactive gas in the system
θm - fraction non-reacted metal sites at target surface
θm,ss - fraction non-reacted metal sites at target surface/subsurface interface [RSD only]
θc - fraction chemisorbed metal sites at target surface
θr - fraction reacted metal sites at target surface [RSD only]
θs - fraction reacted metal sites at substrate surface
nM #M cm-3 concentration non-reacted metal M in target subsurface [RSD only]
nR #R cm-3 concentration non-reacted implanted reactive gas atoms R in target subsurface [RSD only]
vs cm s-1 surface speed of target
ve cm s-1 erosion speed of target
de cm erosion depth of target
εt cm-2 redeposition fraction surface density [RSD only]
εs cm-2 deposition fraction surface density
Qr sccm flow of molecular reactive gas introduced into the vacuum chamber
Qt sccm flow of molecular reactive gas initially getterd by the target
Qs sccm flow of molecular reactive gas gettered by the substrates
Qp sccm flow of molecular reactive gas gettered by the vacuum pump
S Ls-1 pumping speed by the vacuum pump
I A discharge current
Iion A discharge ion current
V V discharge voltage

These variables are resolved by the models on the condition that several material and operation parameters are specified as input. These input parameters are clarified throughout the following sections.

Quick start

To run a first simulation, you just double click the GUI executable RSD2013_GUI.exe. By default a complete input is specified in the window tabs Method, Chamber, Target, Substrate and Output.

Test caption.

Default input.

To run this default simulation, save first the simulation input. By choosing File > Save as ... in the menu bar or  , a window pops up to specify a saving location and a name for the main input file. Choose as location the INPUT directory under the RSD program folder, and as name, for example, my_first_RSD_simulation.in. Press the Save button. Two input files will be created, namely my_first_RSD_simulation.in and my_first_RSD_simulation_OutputSpecs.in. The first file is the main input file, while the second file is the results specification file. These specifications are defined in the window tab Output under Results.

Test caption.

Saving input main file.

The name of the main input file is now listed in the left side window and selected if it is blue highlighted.


On the first saving of the input file or using File > Save as ..., the Select the output directory: and the Prefix for output files: will be automaticly (re)assigned based on the file name. A new output directory with the file name as name is created, one level up in the directory tree that was specified in Select the output directory:. We changed this output directory to .\OUTPUT\my_first_RSD_simulation which will save the output to the relative directory within the program directory.

Test caption.

List of input files.

To run the simulation of this selected input file, choose in the menu bar Simulation > Run selected or  . If everything goes well, a command prompt window pops up, showing the progress of the simulation which closes itself on the end of the simulation.

Test caption.

Running simulation.

To look at the simulation results you have to know where the output files are saved. To check this, go to the window tab Output. In the field Select the output directory: next to the button Choose, the location where the output files are saved is given. The field Prefix for output files: underneath gives the prefix string which every output file will start with. By default this string is the name of the main input file. When browsing to the output file location with Windows explorer, you will see two output files recognizable by the extension .out and two log files recognizable by the extension .log. The file ending with _summary.out is always generated. This file is updated during the simulation run and shows the progress of the simulation as given by the command prompt window. At the end of the simulation it gives the elapsed time for this simulation run and its ending time. The other file ending with _hyst_steady.out contains the simulation results. As this is a steady state simulation, the reactive gas pressure (second column) is increased up to the value 0.2 as specified in field Maximum reactive pressure (Pa) in the window tab Method, and subsequently decreased. The total number of pressure values that are calculated, by default 300, is specified by the field Number of points under the same window tab Method. The columns of this output file with the steady state solution gives the results of the following variables:

  1. Q_r : flow of reactive gas introduced in the vacuum chamber
  2. p_r : partial pressure of reactive gas
  3. theta_s : spatial averaged compound fraction on substrate surface
  4. theta_m : spatial averaged metal fraction on target surface
  5. theta_c : spatial averaged chemisorbed fraction on target surface
  6. theta_r : spatial averaged compound fraction on target surface
  7. theta_m,ss : spatial averaged metal fraction at the target surface/subsurface interface
  8. n_R/n0 : relative concentration of non-reacted implanted reactive gas atoms at the target surface/subsurface interface
  9. Q_p : reactive gas flow pumped away by the vacuum pump
  10. Q_s : reactive gas flow consumed by compound formation on the substrate
  11. Q_t : reactive gas flow consumed (> 0) or released (< 0) by the target
  12. V : discharge voltage
  13. I : discharge current
  14. I_ion : ion current to the target
  15. S : pumping speed of the vacuum pump

Test caption.

Example of output file.

Graphical User Interface (GUI)

The graphical user interface (GUI) is designed to create input files for a RSD simulation in a user-friendly way. These input files can also be manually composed. Single or multiple simulation(s) can also be executed from within the GUI. The GUI can be accessed by the executable RSD2013_GUI.exe. It most important task is to compose the input files for the simulation executable RSD2013.exe. In fact, when starting a simulation from within the GUI, it opens a Windows Command Prompt and runs the RSD2013.exe executable with as single argument the absolute or relative path of the main input file.

Concept

The concept of the GUI is doing the following tasks:

The philosophy of the GUI is as follows. The input of a single simulation is defined in the window tabs, namely Method, Chamber, Target, Substrate and Output. The window at the left of the window tabs is the simulation list window which lists the different simulations. Existing input files can be loaded or new input files can be created. The name within the list is the name of the main input file of a particular simulation. After selecting one or more items in the list, the user can let sequentially run these simulations.

Menu

The menu bar is located at the top of the GUI window. Through this menu the user can

The action of every menu item and icon is explained below.

File

Open

To open or load an existing main input file for editing. Made changes will be saved to this opened main input file and its referenced additional input files.

Hotkey: Ctrl+O

Open as copy

To open or load a copy of an existing main input file for editing. A new name and saving location is asked for the copy. Changes are saved to the created copy. Only the main input file is copied which contains links to the original additional input files. Made changes to these additional input files will as such effect the original.

New

To internally open a new input simulation. It resets the fields in the window tabs to their default values. The input is unsaved (and unlisted) until the Save or Save as ... is used.

Hotkey: Ctrl+N

Save

To save the changes made in the window tabs to the main and additional input files. The made changes in the window tabs are saved to the current selected (blue highlighted) item in the window list. If no main input file is assigned yet, this action corresponds to a Save as ... action.

Selecting an other item in the simulation list window, which is loaded into the window tabs, initiates this Save action for the previous selected item.

Hotkey: Ctrl+S

Save as …

To save and specify a new main input file for the current input of the window tabs. A new main input file is generated together with the additional input files. The main input file is added to the simulation list.

Exit

To exit and close the GUI window. It will not terminate any running simulation.

Simulation

Run selected

To run the selected (blue highlighted) simulations of the simulation list in sequence.

Hotkey: Ctrl+R

Run all

To execute all the simulations of the simulation list in sequence, independent if they are selected or not.

Auto prefix

When checked, it will replace the value of the field Prefix for output files: in the window tab Output of all items in the window list by a three digit number in the same order as they are listed. Numbering starts from 000.


When two or more items in the simulation list have the same prefix for the output files, a warning will appear. In this case, simulation results will overwrite each other.

Kill current run

To kill or abort all running RSD simulations. In fact, it will kill all running RSD2013.exe processes on your platform.

Hotkey: Ctrl+K

Help

Manual

To open the this documentation in a browser.

About

To show information about the RSD2013 software and to whom it acknowledges.

Tabs

The window tabs graphically represent the information contained in the input files of a selected (blue highlighted) simulation in the simulation list. Editing the fields of these tabs changes the simulation input and options.

All simulation options are visual within the window tabs. Unused or irrelevant options or fields are grayed out and made inaccessible. They become (in)accessible depending on which simulation choices you make. For example, when choosing the Steady state method in the window tab Method as solution method, then the fields connected to the Time evolution method are irrelevant and as such grayed out.


Only a limited control on the input values is performed. Faulty input may crash the software at any moment and is up to the users responsibility.

Method

The window tab Method basically specifies which model(s) should be used, which kind of solution method is applied,how the process curve is operated and optional where to find the SiMTra simulation software.

Test caption.

Method window tab.

Model

This model is an extension of the Berg model with as most important extra feature the subsurface implantation of reactive gas ions/atoms and a 2nd order reaction mechanism in the subsurface forming the compound. A chemisorption mechanism governs the reaction on the surface. Redeposition of sputtered material back on the target can be taken into account.

This model is a monolayer surface model which only considers a chemisorption mechanism on the target (and substrate) surfaces. No redeposition can be considered.

Operation

The process curve with possible hysteresis behavior is simulated as function of a Varied operation parameter(s) while other operation parameters are kept fixed and specified under Chamber>Operation conditions. The plasma discharge is characterized by the operation discharge parameters Discharge voltage, Discharge current and Discharge power where one discharge parameter can be fixed or all.

Solution method

As solution method, two options are available the Steady state method and the Time evolution method.

If a range of discharge voltage is requested, the steady state solver will translate this to a conform reactive pressure range to use as independent variable and solve the model. In this way, the specified discharge voltage range will not coincidence with the output range.

Creating step file

Test caption.

Window Creating step file

A step file consist of a list numerical text lines which define a stepwise in/decrease of each of the specified Varied operation parameter(s). Each line consist out of four entries:

The Insert button adds a line to the step file. The already defined lines are shown as a list in the upper window.
By clicking on a line in this list, the line is selected (blue highlighted). By pressing Delete, the line is removed.
By double clicking, the line is selected and loaded in the editing fields. The Varied operation parameter(s) that needs to be changed, is selectable next to Operation parameter:. Only the Step of the first listed operation parameter can be edited as the other step are defined by this Step. After making changes to the line, you can press the Save change button to save the changes to the original line.

Test caption.

Definition of block pulsing of operation parameters.

Test caption.

Definition of sinusoidal pulsing of operation parameters.

Pressing the Ok button save the change to loaded step file or pops up a window to specify a saving location if no step file is loaded yet. A default name is suggested. It is a concatenation of the string stepFile with the name of the main input file.
Save as ... allows to save the stepping as a new step file and replace the original loaded step file.

SiMTra

If SiMTra simulated deposition profiles should be included, the SiMTra home directory has to be specified. This version of RSD is compatible with SiMTra v2.2 which accompanies the RSD2013 software.

Chamber

The window tab Chamber specifies the parameters connected to the gases in the chamber, the fixed operation conditions and the IV-characteristics for the different target states.

Test caption.

Chamber tab window.

Operation conditions

The discharge operation parameters and chamber conditions.

Gas

Parameters specifying the used reactive gas, the global gas temperature and Ar pressure.

IV-characteristics [RSD only]

If the Limited discharge parameter is not set to all, three current-voltage characteristics (IV-characteristics) should be specified for the target in a complete Metallic, Compound or Chemisorbed state at the specified Ar pressure (Pa). These IV-characteristic are highly system dependent (magnetic field configuration, gas pressure, inert gas type). Each IV-characteristic has the form:

Test caption.

with the parameters k, V0 and n depending on the Target state.

IV-characteristics for magnetrons are often well fitted by the Westwood relation www (n=2).
While IV-characteristics for a Metallic and a Compound target state can often been measured, this is not the case for a Chemisorbed target state. This chemisorbed IV-characteristic may be a fitting element or equally set like the metallic or compound IV-characteristic.

Target

The window tab Target specifies the properties and interaction mechanisms of the particles on the target surface and subsurface. There are the sputtered particles (M and MRz), the deposited particles (M and R) and the implanted particles (R2+). It also specifies the geometry of the sputtered target and optional if redeposition of sputtered material back on the target should be considered.

Test caption.

Target tab window tab (part 1).

Metal particle M

Reacted particle particle MR_z

Two types of reacted metal particles are considered. Compound particles are formed in the subsurface by reaction of implanted reactive gas ions and the metal atoms which come to the surface by sputter erosion. Chemisorbed particles are formed on the surface due to the chemisorption of the molecular reactive gas on non-reacted metal atoms. Reaction and particle specific parameters should be specified here.


Test caption.

Target window tab (part 2).

Reactive atom R

Not implemented yet.

Reactive ion R2+ [RSD only]


Test caption.

Target window tab (part 3).

Geometry

Substrate

The window tab Substrate specifies the properties connected with the substrate surface and the interaction mechanisms of the reactive molecular gas with the deposited material. It specifies the deposition profile and fraction on the substrates.

Test caption.

Substrate window tab.

Compound formation

Geometry

Output

The window tab Output specifies which simulation results should be printed to a file, at which frequency and where to save these files.

Test caption.

Output window tab.

Location

Results

By checking the boxes, desired simulation output can be selected to be printed out in files. The available outputs, those that are not grayed out, depend on previous choices and selected options. For example, when choosing the One-cell in the Target tab and Uniform deposition in the Substrate tab, only the Spatial averaged check box can be chosen.

Two output formats can be chosen for the Spatial resolved data: ASCII or binary. The binary format is much compacter compared to the regular ASCII format. The structure of the numerical data is nevertheless the same, only will every numerical be represented by a 32 bit IEEE float value.

Simulation list

The simulation list window lists the loaded or created simulation inputs. A simulation in the list is represented by the file name of the main input file connected to a simulation. By clicking on an item in the list, the simulation input is loaded into the window tabs for editing.

The simulation input which is current in scope is blue highlighted in the simulation list window. Selecting another simulation in the list will automaticly save the made changes in the previous simulation input.

Multiple simulations in the list can be selected (=blue highlighted) to perform one of the following actions:

Right-clicking with the mouse on a selected (=blue highlighted) item in the simulation window list shows the following actions:


Test caption.

Scan window, one varied parameter.


Test caption.

Scan window, two varied parameter.

Scan

The Scan action allows to do a multiple parameter scan. This action is executed on a selected simulation input from the simulation list window. Most parameters of the simulation input can then be varied. For each parameter combination, a new main input file will be generated and as such be inserted as a new item in the simulation list window.

Selecting this Scan action for an item in the window list pops up the scan window. Two lists are defined:

Pressing Ok will generate the simulation inputs and add them to the simulation list window. The file names of the main input file of each item is automatically assigned. The filename of the original main input file is concatenated with the string scan, a keyword characteristic for the varied parameter and the value of the scanned parameter.
The generated main input files will NOT have an own copy of the referenced additional input files.


Test caption.

Simulation list window with one varied parameter.


Test caption.

Simulation list window with two varied parameter.

Command line

The RSD2013 simulation software can be used without the GUI. The executable RSD2013.exe can directly be executed on the Command Prompt if it is provided with the absolute path of a main input file or its relative path with respect to the program directory (where the RSD2013.exe executable is located). This is useful if you want to run the RSD2013 simulation in a script.

This main input file and the additional input files where it references to, can manually be edited or be created by the GUI.

Input files

The input files define all the input needed for a successful RSD2013 simulation. Two types of input files are distinguished:

Some input files are allowed to start or contain comment lines. Those file usually begin with an explanation of the structure of that input file. A comment line always starts with #.

Main input file

The main input file is the input file which is provided to the simulation executable RSD2013.exe. It contains all data and references to data needed for running the simulation. It is a text based file.


Test caption.

Comment section of main input file.


Test caption.

Input section of main input file.

The structure of the file is as follows. It starts with a comment section where every line starting with # is considered as a comment line and is ignored. After this comment section, each line defines input and starts with the keyword rowXXX, where XXX is a number. This keyword rowXXX is omitted when reading in the file. Nevertheless, the line number of each text line defines which kind of parameter, option or reference should be defined. Explanation of which kind of information is expected on each line is given in the comment lines starting this file.


Almost no input restrictions apply in the GUI, and no validity check at the start of a simulation run is performed. Give valid input values are up to the responsibility of the user.

Additional input files

The additional input files are all other input files than the main input file. The main input file contains references to these additional input files, but these additional input files can also contain further references to other additional input files. Several types of additional input files the RSD2013 software possibly needs and/or creates are given below.

Step file

The step file can be created or modified under Method> Solution method> Time evolution method> Step file.


Test caption.

Step file.

The step file defines the evolution of the Varied operation parameter(s) for the Time evolution method. This input file can be edited or loaded in the window tab Method>Stepfile when choosing the Time evolution method. The step file is a text based file which consist out of numerical text lines. After an optional comment section (lines starting with #), the pulsing of the Varied operation parameter(s) can be specified as no pulsing NA or block pulsing block. The second non-comment line should contain the number of value ranges (or numerical text lines) that are specified next. Each consecutive line defines then a range over which the Varied operation parameter(s) may be varied. The first entry of such a line defines the start value, the second entry the end value, the third entry the step with which the start value is stepwise increased until it reaches the end value. The last entry is the maximum time the given `Varied operation parameter(s)` may be set, depending on the chosen options for the parameter stepping.

Current profile file

The current profile file can be loaded under Target> Geometry> Multi-cell> Current profile.
The current profile file defines how the total ion current is distributed over the target. Two types of current profile are possible depending on the shape of the target: a circular or a rectangular target. The current profile file is a text based file. The first non-comment line is the keyword circular or rectangular that can be enclosed by comment lines. The numerical text lines define the profile. The profile has not be particularly normalized.

SiMTra input file

The SiMTra input file can be loaded and modified under Target>Metal particle M> SiMTra.
The SiMTra input file should be a valid input file for the SiMTra version 2.2 For details about this file, check the SiMTra documentation.

(Re)deposition listing file

The (re)deposition listing file can be loaded and/or assigned under Target> Geometry> Redeposition> Manual input> Input file listing the deposition files for the target and under Substrate> Geometry](#SubstrateGeometry)> Deposition profile> Manual input> Input file listing the deposition files for the substrates.


Test caption.

Redeposition listing file.


Test caption.

Deposition listing file.

Only needed if the old style of including deposition distributions is used (Manual input). The preferred way is the loading a SiMTra input file.

The file lists the deposition profile files for the target (only one) or for the substrate (multiple possible). Its structure is as follows: the first non-comment line of the file gives the number of included (re)deposition profile files. Each following couple of lines represent the full path or relative path of the deposition profile file, while the second line contains the area which corresponds with the deposition profile. This area should take into account the full rectangular matrix of the profile, also when there are (ignored) zero elements (Skip counts equal zero).

(Re)deposition profile file

A single redeposition profile file can be loaded under Target> Geometry> Redeposition> Manual input> Load deposition files for the target and multiple deposition files can be loaded under Substrate> Geometry> Deposition profile> Manual input> Load deposition files for the substrates.

Only needed to be specified if the old style of including deposition distributions is used (Manual input). The preferred way is the loading a SiMTra input file


Test caption.

Deposition file.

A (re)deposition profile file defines the relative number of sputtered particles (atoms) that is deposited on a surface. Such file is text based and matrix structured conform a deposition file from SiIMTra. The first two entries on the first line define respectively the number of rows and columns of the matrix. The rest of the line is ignored. All following lines define the matrix with integers.

Result specification file

The result specification file can be specified or loaded under Output> Results> Input file with the results specifications.

The file with the results specifications determines which output will be generated when a simulation is executed. The text file structure closely resemblance the window tab Output.

With each kind of output, a keyword is linked. When this keyword is not preceded by x, o or v, this output is not printed to file. The x is used for a checkbox, the o for a radiobutton and v for a choice in a roll-down list.


Test caption.

Result specification file.

In this example the spatial averaged variables are generated, the spatial resolved metal fractions on the target are generated in an ASCII format and in binary format the spatial resolved compound fractions on the substrate are generated.

The frequency of printing out results as a multiple of the Time step, is saved in the main input file.

Output files

Output files always have the extension .out. Which output files are produced, is determined by the result specification file or in the window tab Output. A summary of the simulation run is always generated and is recognized by the ending string summary.out. The file name of each other output file starts with the chosen Prefix for output files and ends with an unique keyword string.

Spatial averaged

Two output files may correspond with the Spatial averaged option. For the Steady state method, only an output file with suffix hyst_steady.out is produced. Each column in this file states the following steady state variables

  1. Q_r : flow of reactive gas introduced in the vacuum chamber
  2. p_r : partial pressure of reactive gas
  3. theta_s : spatial averaged compound fraction on substrate surface
  4. theta_m : spatial averaged metal fraction on target surface
  5. theta_c : spatial averaged chemisorbed fraction on target surface
  6. theta_r : spatial averaged compound fraction on target surface
  7. theta_m,ss : spatial averaged metal fraction at the target surface/subsurface interface
  8. n_R/n0 : relative concentration of non-reacted implanted reactive gas atoms at the target surface/subsurface interface
  9. Q_p : reactive gas flow pumped away by the vacuum pump
  10. Q_s : reactive gas flow consumed by compound formation on the substrate
  11. Q_t : reactive gas flow consumed (> 0) or released (< 0) by the target
  12. V : discharge voltage
  13. I : discharge current
  14. I_ion : ion current to the target
  15. S : pumping speed of the vacuum pump


Test caption.

Output file hyst_time.out.

For the Time evolution method, this file contains the values of the variables at the end of every Varied operation parameter(s) step. A second output file is also generated with suffix hyst_time.out. This file contains the same variables as above, but adds as 12th column the time elapsed in the simulation.

  1. t : time in the simulation

The spatial averaged variables correspond with these time stamps where the frequency is specified as a multiple of the Time step.

The spatial averaged values are in fact weighted by the Current profile.

Spatial resolved

When the target and/or the substrate is spatial resolved by defining respectively a Current profile and/or a Deposition profile, spatial resolved output can be generated. We consider spatial resolved output on a surface (2D) for the target and the substrate or within a volume (3D) for the target. The format how this data is written to the files can be simple ASCII or in a binary format. In the binary format the structure is the same as for the ASCII format, but every number is binary represented by a 32 bit IEEE float value.

Surface profile (2-D)

Surface resolved output can be generated for the target and for the substrate when choosing a Current profile and a Deposition profile respectively. A table listing the different variables which can be resolved on a surface is given under Output> Results.

The format of the file is as follows. The first entry of the first line of the file is the number of columns which equals the cells in the x or radial dimension. The rest of the first line numbers the columns starting from zero. The first entry on each following line numbers the rows which equals the cells in the y or azimuthal dimension. The following entries on each line represent the variable value in the matrix.
If a substrate surface (only a Circle) is specified to axial rotate at a given speed within RSD, not if Enable movement is selected, the output matrix is a polar representation of the surface with the rows as the radial and the columns as azimuthal dimension.

The data of the surface is saved at every steady state point if 0 is specified for Spatial resolved or at the specified multiples of the Time step The row numbering is restarted after every print out. A value of -1 means that this surface cell is not considered in the simulation.

For the Spatial resolved substrate:
- Substrate> Geometry> Deposition profile> Manual input :
The output file names are suffixed with the order number as they occur in the deposition listing file.
- Substrate> Geometry> Deposition profile> SiMTra configuration :
The same directory structure as the SiMTra output for the different Object and Surface is constructed with the Object name and Surface name appended to the file names.

Subsurface profile (3-D)

Subsurface resolved output can be generated for the target when choosing a current profile. A table listing the different variables which can be resolved for the subsurface is given under Results.

The format of the file is as follows. The first entry of the first line is 100, the number of columns which equals the in-depth points where a fraction is defined. The rest of the first line defines the depth (in cm) where a variable is resolved. This depth stretches over the implantation zone (which equals μ + 3σ for a Gaussian profile or the Depth for a uniform profile). The first entry on each following line numbers the rows which equals the number of surface cells (product of the number of cells in the y or azimuthal dimension and of the number of cell in the x or radial dimension). The numbering starts with the number of cells in the y or azimuthal dimension for a fixed x or radial cell. The following entries on each line represent the in-depth values for the corresponding surface cell.

The data of the surface is saved at every steady state point if 0 is specified for Spatial resolved or at the specified multiples of the Time step The row numbering is restarted after every print out. A value of -1 means that this surface cell is not considered in the simulation.

End remark

I would be grateful for any comment, suggestion for improvement, mistake or typo occurring in this documentation or software. Feel encouraged to contact us at koen.strijckmans@ugent.be (or diederik.depla@ugent.be).