Nineth International Conference on Reactive Sputter Deposition 2010
Ghent, Belgium - 9 & 10 Dec 2010
The international Reactive Sputter Deposition Symposium 2010 was back in Ghent on 9 & 10 December 2010.
About 100 delegates from both university and industry attended this interesting symposium.
This symposium addressed the following topics:
Ion - Solid Interactions
Invited Speaker: prof. dr. W. Möller "Ion-surface interactions in thin film processing"
Keynote Speaker: prof. dr. S. Lucas "From target to substrate: a journey full of interactions"
Stress in polycrystalline films
Invited Speaker: prof. dr. E. Chason "Understanding the evolution of stress in sputtered films: effect of competing kinetic processes"
Keynote Speaker: prof. dr. Grégory Abadias "In situ stress evolutions in low mobility metal and nitride films during magnetron sputtering"
Invited Speaker: prof. dr. Matthias Wuttig "Phase change materials: a challenge for our understanding of amorphous and crystalline solids"
Keynote Speaker: prof. dr. A. Billard "Synthesis, characterisation and applications of sputter deposited solid electrolytes"
Invited Speaker: prof. dr. U. Helmersson "Fundamentals of high power impulse magnetron sputtering"
Keynote Speaker: dr. Stephanos Konstantinidis "The synthesis of oxide layers by High-Power Impulse Magnetron Sputtering"
You can get a copy of the book of abstracts here.
For a view of the programme, please click here.
The RSD2010 Organising Committee:
Prof. Diederik Depla, Ghent University
Prof. Roger De Gryse, Ghent University
Dr. Wouter Leroy, Ghent University